Deposition of Thin Films: PECVD Process. A. Menéndez, P. Sánchez, D. Gómez, (2013)
29-57 in “Silicon Based Thin Film Solar Cells” (ISBN: 978-1-60805-456-5). Editor: Roberto Murri, Bentham Science Publishers 2013
29-57 in “Silicon Based Thin Film Solar Cells” (ISBN: 978-1-60805-456-5). Editor: Roberto Murri, Bentham Science Publishers 2013